Nano manipulater

ABSTRACT

A nano manipulator comprises a base and a clamping structure. The clamping structure comprises two nanofiber actuators located on the base and spaced from each other. Each of the two nanofiber actuators comprises a composite structure and a vanadium dioxide layer. The composite structure comprises a carbon nanotube wire and an aluminum oxide layer. The aluminum oxide layer is coated on a surface of the carbon nanotube wire, and the aluminum oxide layer and the carbon nanotube wire are located coaxially with each other. The vanadium dioxide layer is coated on a surface of the composite structure, and the vanadium dioxide layer and the composite structure are located non-coaxially with each other.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims all benefits accruing under 35 U.S.C. § 119 fromChina Patent Application No. 202010348553.1, filed on Apr. 28, 2020, inthe China National Intellectual Property Administration, the contents ofwhich are hereby incorporated by reference. The application is alsorelated to copending applications entitled, “NANOFIBER ACTUATOR ANDMETHOD FOR MAKING THE SAME”, with application number of Ser. No.16/996,686, filed on Aug. 18, 2020; “BIONIC ARM”, with applicationnumber of Ser. No. 16/996,695, filed on Aug. 18, 2020; “LASER REMOTECONTROL SWITCHING SYSTEM”, with application number of Ser. No.16/996,702, filed on Aug. 18, 2020.

FIELD

The present disclosure relates to a nano manipulator.

BACKGROUND

An actuator is a device used to convert the other energy into mechanicalenergy. The type of actuator usually includes an electrostatic drivenactuator, magnetic driven actuator, and thermal driven actuator, such asan electro-thermal actuator. A conventional electro-thermal actuator isa membrane structure of which a main material is polymer. When a currentis applied, a temperature of the polymer is increased, which can lead toa sensible volume expansion of the polymer, and then the membranestructure bends and the electro-thermal actuator is activated. Thus,electrode materials of the electro-thermal actuator are required to beexcellent conductive, flexible, and thermally stable due to itsoperating principle.

Composite materials containing carbon nanotubes are conductive andalready being used for the electro-thermal actuator. When a current isapplied, the electro-thermal composite materials containing carbonnanotubes can generate heat. Then a volume of the electro-thermalcomposite materials is expanded and the electro-thermal compositematerials bend. However, conventional electro-thermal compositematerials can only be bend in one direction. An improvement in the artis preferred.

BRIEF DESCRIPTION OF THE DRAWINGS

Implementations of the present technology will now be described, by wayof example only, with reference to the attached figures.

FIG. 1 is a view of one embodiment of a nanofiber actuator.

FIG. 2 is an optical photograph of one embodiment of a bending change ofthe nanofiber actuator during heating and cooling.

FIG. 3 is a scanning electron micrograph (SEM) image of one embodimentof a non-twisted carbon nanotube wire.

FIG. 4 is a scanning electron micrograph (SEM) image of one embodimentof a twisted carbon nanotube wire.

FIG. 5 is a schematic diagram of one embodiment of four actuation stagesin the process of heating and cooling of the nanofiber actuator.

FIG. 6 is a functional relationship of one embodiment between adisplacement of the nanofiber actuator and a heating temperature.

FIG. 7 is a graph showing a relationship between resistance andtemperature of a pure vanadium dioxide film during heating and cooling.

FIG. 8 is a graph showing a relationship between resistance andtemperature of the nanofiber actuator during heating and cooling.

FIG. 9 is a function diagram of one embodiment of a displacement of thenanofiber actuator and a laser power intensity.

FIG. 10 is a flowchart of one embodiment of a method for making thenanofiber actuator.

FIG. 11 is a view of the second embodiment of a bionic arm.

FIG. 12 is a view of the third embodiment of a nano manipulator.

FIG. 13 is a view of another third embodiment of the nano manipulator.

FIG. 14 is an optical photograph of the third embodiment of the nanomanipulator irradiated with laser light.

FIG. 15 is a view of the fourth embodiment of a laser remote controlswitching system.

DETAILED DESCRIPTION

The disclosure is illustrated by way of example and not by way oflimitation in the figures of the accompanying drawings in which likereferences indicate similar elements. It should be noted that referencesto “an” or “one” embodiment in this disclosure are not necessarily tothe same embodiment, and such references mean “at least one”.

It will be appreciated that for simplicity and clarity of illustration,where appropriate, reference numerals have been repeated among thedifferent figures to indicate corresponding or analogous elements. Inaddition, numerous specific details are set forth in order to provide athorough understanding of the embodiments described herein. However, itwill be understood by those of ordinary skill in the art that theembodiments described herein can be practiced without these specificdetails. In other instances, methods, procedures, and components havenot been described in detail so as not to obscure the related relevantfeature being described. Also, the description is not to be consideredas limiting the scope of the embodiments described herein. The drawingsare not necessarily to scale, and the proportions of certain parts canbe exaggerated to illustrate details and features of the presentdisclosure better.

Several definitions that apply throughout this disclosure will now bepresented.

The term “comprise” or “comprising” when utilized, means “include orincluding, but not necessarily limited to”; it specifically indicatesopen-ended inclusion or membership in the so-described combination,group, series, and the like.

Referring to FIG. 1, a nanofiber actuator 100 is provided in oneembodiment. The nanofiber actuator 100 comprises a composite structure12 and a vanadium dioxide layer 14. The composite structure 12 comprisesa carbon nanotube wire 121 and an aluminum oxide layer 123. The aluminumoxide layer 123 is coated on a surface of the carbon nanotube wire 121,and the aluminum oxide layer 123 and the carbon nanotube wire 121 arelocated coaxially with each other. The vanadium dioxide layer 14 iscoated on a surface of the composite structure 12, and the vanadiumdioxide layer 14 and the composite structure 12 are locatednon-coaxially with each other.

The composite structure 12 comprises the carbon nanotube wire 121 andthe aluminum oxide layer 123. In one embodiment, the composite structure12 consists of the carbon nanotube wire 121 and the aluminum oxide layer123. The aluminum oxide layer 123 is uniformly coated and covered on anentire outer surface of the carbon nanotube wire 121. The aluminum oxidelayer 123 and the carbon nanotube wire 121 are located coaxially. Alength of the carbon nanotube wire 121 is in a range from about 10 μm toabout 3 cm. A diameter of the carbon nanotube wire 121 is in a rangefrom about 0.5 nm to about 100 nm. In one embodiment, the diameter ofthe carbon nanotube wire 121 is in a range from about 0.5 nm to about 10nm. A thickness of the aluminum oxide layer 123 is in a range from about5 nm to about 100 nm. In one embodiment, the thickness of the aluminumoxide layer 123 is about 10 nm.

The carbon nanotube wire 121 is capable of forming a free-standingstructure. The term “free-standing structure” can be defined as astructure that does not have to be supported by a substrate. Forexample, a free-standing structure can sustain the weight of itself whenit is hoisted by a portion thereof without any significant damage to itsstructural integrity. So, if the carbon nanotube wire 121 is placedbetween two separate supporters, a portion of the carbon nanotube wire121, not in contact with the two supporters, would be suspended betweenthe two supporters and yet maintain wire structural integrity.

The carbon nanotube wire 121 comprises at least one carbon nanotube. Thecarbon nanotube wire 121 can consist of a single carbon nanotube. Thecarbon nanotube wire 121 can comprise a plurality of carbon nanotubes.When the carbon nanotube wire 121 is a single carbon nanotube, thesingle carbon nanotube can be an ultra-long carbon nanotube. A length ofthe ultra-long carbon nanotubes is greater than about 1 cm. It can beunderstood that the ultra-long carbon nanotubes can be cut to obtain arequired length of the carbon nanotube wire 121. The preparation methodof the ultra-long carbon nanotubes can refer to the patent applicationNo. CN101497436A filed on Feb. 1, 2008, by Shoushan Fan et al. andpublished on Aug. 5, 2009. In order to save space, it is only citedhere, but all the technical disclosure of the application should also beregarded as a part of the technical disclosure of the application of thepresent invention. In one embodiment, the carbon nanotube wire 121 is asingle carbon nanotube, a length of the single carbon nanotube is about50 microns, and a diameter of the single carbon nanotube is about 2.11nanometers.

When the carbon nanotube wire 121 comprises a plurality of carbonnanotubes, the carbon nanotube wire 121 can be a non-twisted carbonnanotube wire or a twisted carbon nanotube wire.

Referring to FIG. 3, the carbon nanotube wire 121 is a non-twistedcarbon nanotube wire. The non-twisted carbon nanotube wire comprises aplurality of carbon nanotubes. The plurality of carbon nanotubes aresubstantially parallel to each other and joined end to end by Van derWaals attractive force along an axis of the carbon nanotube wire 121.The carbon nanotube wire 121 can be obtained by treating the carbonnanotube drawn film with an organic solvent. The carbon nanotube drawnfilm is a free-standing carbon nanotube film obtained by directlypulling from a carbon nanotube array. The carbon nanotube drawn filmcomprises a plurality of successively oriented carbon nanotube segmentsjoined end-to-end by Van der Waals attractive force therebetween. Eachcarbon nanotube segment comprises a plurality of carbon nanotubessubstantially parallel to each other and joined by Van der Waalsattractive force therebetween. The carbon nanotube segments can vary inwidth, thickness, uniformity, and shape. The carbon nanotubes in thecarbon nanotube drawn film are also substantially oriented along apreferred orientation.

Specifically, the carbon nanotube drawn film can be treated by applyingorganic solvent to the carbon nanotube drawn film to soak the entiresurface of the carbon nanotube drawn film. The organic solvent isvolatile and can be selected from the group consisting of ethanol,methanol, acetone, dichloroethane, chloroform, any appropriate mixturethereof. In one embodiment, the organic solvent is ethanol. After beingsoaked by the organic solvent, the non-twisted carbon nanotube wire willbe formed by adjacent carbon nanotubes in the carbon nanotube drawn filmthat are able to do so, bundling together, due to the surface tension ofthe organic solvent when the organic solvent volatilizing. Compared withthe carbon nanotube drawn film without organic solvent treatment, aspecific surface area and viscosity of the non-twisted carbon nanotubewire are reduced. The preparation method of the carbon nanotube drawnfilm refers to the patent published in China No. CN101239712B filed onFeb. 9, 2007, by Shoushan Fan et al. and published on May 26, 2010. Thepreparation method of the non-twisted carbon nanotube wire refers to thepatent published in China No. CN100411979C filed on Sep. 16, 2002, byShoushan Fan et al. and published on Aug. 20, 2008. In order to savespace, it is only cited here, but all the technical disclosure of theapplication should also be regarded as a part of the technicaldisclosure of the application of the present invention.

Referring to FIG. 4, the carbon nanotube wire 121 is a twisted carbonnanotube wire. The twisted carbon nanotube wire is formed by twisting acarbon nanotube film by using a mechanical force to turn the two ends ofthe carbon nanotube film in opposite directions. The twisted carbonnanotube wire comprises a plurality of carbon nanotubes oriented aroundan axial direction of the twisted carbon nanotube wire. The plurality ofcarbon nanotubes are aligned around the axis of the carbon nanotubetwisted wire like a helix. More specifically, the twisted carbonnanotube wire comprises a plurality of successive carbon nanotubesegment joined end to end by van der Waals attractive forcetherebetween. Each carbon nanotube segment comprises a plurality ofcarbon nanotubes parallel to each other and combined by van der Waalsattractive force therebetween. The carbon nanotube segments can vary inwidth, thickness, uniformity, and shape. The twisted carbon nanotubewire can be treated with a volatile organic solvent. After being soakedby the organic solvent, the adjacent paralleled carbon nanotubes in thetwisted carbon nanotube wire will bundle together, due to the surfacetension of the organic solvent when the organic solvent volatilizing.The specific surface area of the twisted carbon nanotube wire willdecrease. The density and strength of the twisted carbon nanotube wirewill be increase. The preparation method of the twisted carbon nanotubewire refers to the patent published in China No. CN100500556C filed onDec. 16, 2005, by Shoushan Fan et al. and published on Jun. 17, 2009. Inorder to save space, it is only cited here, but all the technicaldisclosure of the application should also be regarded as a part of thetechnical disclosure of the application of the present invention.

The composite structure 12 can further comprise a carbon layer 125. Inone embodiment, the composite structure 12 consists of the carbonnanotube wire 121, the carbon layer 125, and the aluminum oxide layer123. The carbon layer 125 is located between the carbon nanotube wire121 and the aluminum oxide layer 123. The carbon layer 125 is directlyin contact with the carbon nanotube wire 121 and the aluminum oxidelayer 123. The carbon layer 125 is located coaxially with the carbonnanotube wire 121 and the aluminum oxide layer 123. The carbon layer 125uniformly covers and coats a surface of the carbon nanotube wire 121.The carbon layer 125 is an amorphous carbon layer. A thickness of thecarbon layer 125 is in a range from about 0.1 nm to about 10 nm. In oneembodiment, the thickness of the carbon layer 125 is about 0.92 nm.

The vanadium dioxide layer 14 is coated on the surface of the compositestructure 12, that is, the vanadium dioxide layer 14 is coated on thesurface of the aluminum oxide layer 123. In one embodiment, thenanofiber actuator 100 consists of the composite structure 12 and thevanadium dioxide layer 14. The vanadium dioxide layer 14 and thecomposite structure 12 are located non-coaxially. Specifically,referring to FIG. 1, a cross-section direction of the nanofiber actuator100 is perpendicular to the axial direction of the nanofiber actuator100. A thickness of the vanadium dioxide layer 14 coated on the surfaceof the composite structure 12 is different. That is, the compositestructure 12 is located away from the axis of the nanofiber actuator100. It can be understood that an individual vanadium dioxide layer 14is a hollow structure, and its wall thickness is not uniform. Thethickness of the vanadium dioxide layer 14 coated on the surface of thecomposite structure 12 is defined as a wall thickness of individualvanadium dioxide layer 14 The thickness of the vanadium dioxide layer 14can be selected according to actual needs. A ratio between a maximumthickness of the vanadium dioxide layer 14 and a minimum thickness ofthe vanadium dioxide layer 14 is in a range from about 9:1 to about 7:1.In one embodiment, the ratio between the maximum thickness of thevanadium dioxide layer 14 and the minimum thickness of the vanadiumdioxide layer 14 is about 8:1. In another embodiment, the maximumthickness of the vanadium dioxide layer 14 is about 72 nm, and theminimum thickness of the vanadium dioxide layer 14 is about 9 nm. Usingthe axis of the nanofiber actuator 100 as a reference, the side with thelarger thickness of the vanadium dioxide layer 14 is defined as thefirst side, and the side with the smaller thickness of the vanadiumdioxide layer 14 is defined as the second side.

The material of the vanadium dioxide layer 14 can be pure vanadiumdioxide or doped vanadium dioxide. A phase transition temperature of thevanadium dioxide layer 14 can be changed by doping. The doped elementcan be tungsten, molybdenum, aluminum, phosphorus, niobium, thallium,fluorine, or combinations thereof. A weight ratio of a doping materialin the vanadium dioxide layer 14 can be in a range from about 0.5% toabout 5%. Doping large-sized atoms such as tungsten and molybdenum caneffectively reduce the phase transition temperature of the vanadiumdioxide layer 14. Doping small-sized atoms such as aluminum andphosphorus can effectively increase the phase transition temperature ofthe vanadium dioxide layer 14.

Referring to FIG. 4 and FIG. 5, the nanofiber actuator 100 has abidirectional actuation characteristic. Referring to FIG. 2, one end ofthe nanofiber actuator 100 is fixed on a tungsten tip by its ownattraction force. The nanofiber actuator 100 is irradiated with laserlight. As shown in FIG. 2, during a heating process and a coolingprocess, the nanofiber actuator 100 bends in two opposite directionsseparately. Therefore, the nanofiber actuator 100 has a bidirectionalactuation characteristic.

Taking the axis of the nanofiber actuator 100 as a reference, when thenanofiber actuator 100 bents toward the first side, the actuationbehavior is defined as a positive actuation; when the nanofiber actuator100 bents toward the second side different from the first side n, theactuation behavior is defined as a negative actuation. Referring to FIG.5, the nanofiber actuator 100 has four actuation stages during heatingand cooling. In the process of heating the nanofiber actuator 100, theactuation process of the nanofiber actuator 100 comprises a firstactuation stage and a second actuation stage. In the process of coolingthe nanofiber actuator 100, the actuation process of the nanofiberactuator 100 comprises a third actuation stage and a fourth actuationstage. During the actuation process of the nanofiber actuator 100, thefirst actuation stage and the fourth actuation stage are negativeactuation, and the second actuation stage and the third actuation stageare positive actuation.

The phase transition temperature of the vanadium dioxide layer 14 isabout 65° C. When a temperature of the vanadium dioxide layer 14 isbelow the phase transition temperature, for example, the vanadiumdioxide layer 14 has an insulating phase at normal temperature. Thus,the vanadium dioxide layer 14 acts as an insulator. When the temperatureof the vanadium dioxide layer 14 is heated to the phase transitiontemperature, the vanadium dioxide layer 14 undergoes a phase transitionfrom an insulating phase to a metallic phase, and also causes volumeshrinkage along a c-axis direction of the metallic phase. Therefore,when the temperature of the nanofiber actuator 100 is greater than orequal to the phase transition temperature of the vanadium dioxide layer14, the nanofiber actuator 100 bends to the first side. When thetemperature of the nanofiber actuator 100 is lower than the phasetransition temperature of the vanadium dioxide layer 14, the nanofiberactuator 100 bends to the second side.

The volume shrinkage of the vanadium dioxide layer 14 caused by phasetransition determines the positive actuation of the nanofiber actuator100 in the second actuation stage and the negative actuation of thenanofiber actuator 100 in the fourth actuation stage. Referring to Table1, since vanadium dioxide has a larger thermal expansion coefficientthan alumina and carbon nanotubes, the actuation of the nanofiberactuator 100 in the first actuation stage is negatively actuation, andthe actuation of the nanofiber actuator 100 in the third actuation stageis positive actuation. Specifically, in the first actuation stage, sincethe thermal expansion coefficient of vanadium dioxide is greater thanthat of alumina and carbon nanotubes, the volume change of the firstside of the nanofiber actuator 100 after heating is larger than thevolume of the second side. Therefore, the nanofiber actuator 100 bentsto the second side. During the third actuation stage of cooling thenanofiber actuator 100, the thermal expansion coefficient of thenanofiber actuator 100 still maintains the thermal expansion coefficientof the second actuation stage. Therefore, the second side of thenanofiber actuator 100 still continues to bend, that is, the actuationbehavior of the nanofiber actuator 100 remains positively actuation.

TABLE 1 Material properties of nanofiber actuators Carbon VanadiumMaterial nanotubes Alumina dioxide Poisson's ratio 0.2 0.22 0.3 Young'smodulus (GPa) 450 400 140 Thermal condutivity (Wm⁻¹K⁻¹) 2000 35 5 Heatcapacity (JKg⁻¹K⁻¹) 1000 730 700 Coefficient of thermal expansion 3 6.5α (T) (10⁻⁶K⁻¹)

FIG. 6 is a function diagram of a displacement of the nanofiber actuator100 and the heating temperature. A heating plate is used to heat thenanofiber actuator 100. The material of the heating plate is Pi heatingbelt and copper block. As shown FIG. 6, the nanofiber actuator 100 isbidirectionally actuated and has a large displacement during heating andcooling. Therefore, the nanofiber actuator 100 has a large deformation.

FIG. 7 is a graph showing a relationship between resistance andtemperature of a pure vanadium dioxide film during heating and cooling.FIG. 8 is a graph showing a relationship between resistance andtemperature of the nanofiber actuator 100 during heating and cooling. InFIG. 7, the pure vanadium dioxide film is located on a quartz substrate,and in FIG. 8, the nanofiber actuator 100 is located on a siliconsubstrate coated by a silicon oxide coating. The pure vanadium dioxidefilm and the nanofiber actuator 100 are tested under the sameparameters. As shown in FIG. 7 that during heating and cooling of thepure vanadium dioxide thin film, the resistance of the pure vanadiumdioxide thin film sharply decreases by about three orders of magnitude.As shown in FIG. 8, during heating and cooling of the nanofiber actuator100, the resistance of the nanofiber actuator 100 changes byapproximately 200 times throughout the MIT region. It can be seen thatthe resistance change rate of the nanofiber actuator 100 is lower thanthat of the pure vanadium dioxide film.

FIG. 9 is a function diagram of a displacement of the nanofiber actuator100 and a laser power intensity. A laser with a wavelength of 808nanometers is used to irradiate the nanofiber actuator 100 with a lengthof 50 micrometers, and the nanofiber actuator 100 absorbs the heat ofthe laser and performs bidirectional actuation. As shown in FIG. 9,during the heating process, the nanofiber actuator 100 achieves amaximum negative displacement of about 37 μm at a power intensity of 300mW, and the nanofiber actuator 100 achieves a maximum positivedisplacement of about 45 μm at a power intensity of 460 mW.

In the nanofiber actuator 100, the vanadium dioxide layer 14 and thecomposite structure 12 are arranged non-coaxially, and a thermalmismatch between the vanadium dioxide layer 14 and the compositestructure 12 makes the nanofiber actuator 100 have a large-scalebidirectional actuation function. The nanofiber actuator 100 has a largedisplacement in both directions. Since the diameter of the nanofiberactuator 100 is in nanometer sized, a response speed of the nanofiberactuator 100 is fast, and at the same time, a mass of the nanofiberactuator 100 is reduced, which is beneficial to the application of thenanofiber actuator 100.

FIG. 10 illustrates a method of one embodiment of making a nanofiberactuator 100, the method comprises:

S11, providing a carbon nanotube wire 121 and a substrate, and placingthe carbon nanotube wire 121 on the substrate to suspend a part of thecarbon nanotube wire 121;

S12, coating an aluminum oxide layer 123 on a surface of the carbonnanotube wire 121 to form a composite structure 12; and

S13, coating a vanadium dioxide layer 14 on a surface of the compositestructure 12.

In the step S11, the carbon nanotube wire 121 is grown on the substrateby a physical vapor deposition method or a chemical vapor depositionmethod. The carbon nanotube wire 121 comprises at least one carbonnanotube. The material of the substrate can be silicon, silicon oxide,silicon nitride, and combinations thereof. The substrate can comprise aplurality of gaps. The plurality of gaps can be formed by aphotolithography method. When the carbon nanotube wire 121 is located onthe substrate, the carbon nanotube tube 121 corresponding to the gap issuspended. In one embodiment, the carbon nanotube wire 121 is a singlecarbon nanotube grown by chemical vapor deposition. The material of thesubstrate is Si—SiO₂—Si₃N₄. The substrate has seven elongated gas with awidth of about 350 microns.

In one embodiment, in step S11, a Fe catalyst film is located on aSi—SiO₂—Si₃N₄ substrate to grow carbon nanotubes by the chemical vapordeposition method. Specifically, the substrate provided with thecatalyst is transferred to a quartz tube, and carbon nanotubes grow withflowing a hydrogen gas (216 sccm), an ethylene gas (0.8 sccm), a carbondioxide gas (0.3 sccm) in an argon atmosphere (452 sccm) at 970° C. for14 min, then the temperature is decreased to 600° C., a flow rate of theargon atmosphere is increased to 1000 sccm, an ethylene gas and thecarbon dioxide gas are turned off, and maintained for 10 min. Finally,the substrate is naturally cooled down to a room temperature. The carbonnanotube is an ultra-long carbon nanotube with a length greater thanabout 1 cm.

In the step S12, the aluminum oxide layer 123 is coated and covered onthe surface of the carbon nanotube wire 121 by an atomic depositionmethod. Specifically, the composite structure 12 is formed by uniformlycoating the aluminum oxide layer 123 on the outer surface of thesuspended portion of the carbon nanotube wire 121 by the atomicdeposition method. In one embodiment, a trimethyl aluminum (TMA) is usedas a metal precursor, and H₂O and nitrogen (N₂) are used as an oxygensource and a carrier gas. The substrate provided with the carbonnanotube wire 121 is transferred to a chamber of an ALD system(NorthStar™, SVTA, USA), and the aluminum oxide layer 123 is depositedat about 120° C. The flow rate of N₂ is about 5 sccm. The thickness ofthe aluminum oxide layer 123 is about 10 nm.

In step S13, the method of coating the vanadium dioxide layer 14 on thesurface of the composite structure 12 comprises:

S131, depositing a VO_(x) layer on the surface of the aluminum oxidelayer 123 to form a VO_(x) composite; and

S132. annealing the VO_(x) composite in an oxygen atmosphere, whereinthe VO_(x) layer is transformed into the vanadium dioxide layer 14.

In step S131, a method for depositing the vanadium oxide layer is notlimited, and it can be a chemical vapor deposition method, a magnetronsputtering method, or the like. In step S132, the oxygen atmosphere canbe pure oxygen gas or air.

In one embodiment, in step S131, the VO_(x) layer is deposited on thesurface of the aluminum oxide layer 123 by DC magnetron sputtering. TheDC magnetron sputtering system has a high-purity vanadium metal target.The sputtering is carried out with flowing gas mixtures of 49.7 standardcubic centimeters per minute (sccm) Ar and 0.3 sccm O₂, for 25 minutes,at DC power of 60 W, and at room temperature. In the step S132, theVO_(x) composite is annealed in low-pressure pure O₂ atmosphere under3×10⁻² mbar at 450° C. for 10 minutes.

Alternatively, between the steps S11 and S12, a step of forming thecarbon layer 125 on the surface of the carbon nanotube wire 121 can becomprised. Specifically, the carbon layer 125 is coated on the surfaceof the carbon nanotube wire 121 by DC magnetron sputtering. In oneembodiment, an amorphous carbon is coated and covered on the surface ofthe carbon nanotube wire 121 by DC magnetron sputtering. The sputteringis carried out at room temperature with flowing argon gas (25 sccm)under 0.3 pa for 10 s, at DC power of 72 W. A thickness of the carbonlayer 125 is about 0.92 nm.

The method for making the nanofiber actuator 100 provided in thisembodiment is simple to operate and is beneficial to mass production. Instep S12, the aluminum oxide layer 123 is formed on the surface of thesuspended carbon nanotube wire 121 by atomic deposition, and thealuminum oxide layer 123 is uniformly coated on the surface of thesuspended portion of the carbon nanotube wire 121, and, the aluminumoxide layer 123 is located coaxially with the carbon nanotube wire 121.In step S13, a VO_(x) layer is deposited on the surface of the aluminumoxide layer 123 by DC magnetron sputtering, and then the vanadiumdioxide layer 14 is formed through annealing. The vanadium dioxide layer14 is coated on the surface of the composite structure 12, and thevanadium dioxide layer 14 and the composite structure 12 are locatednon-coaxially.

Referring to FIG. 11, a bionic arm 20 of a second embodiment isprovided. The bionic arm 20 comprises a bionic palm 22 and at least onefinger 24. The at least one finger 24 is a nanofiber actuator 200. Thestructure of the nanofiber actuator 200 is the same as that of thenanofiber actuator 100, except that a diameter of the nanofiber actuator200 is greater than the diameter of the nanofiber actuator 100. Thediameter of the nanofiber actuator 200 is in a range from about 0.5 cmto about 3 cm.

The nanofiber actuator 200 comprises a composite structure 12 and avanadium dioxide layer 14. The composite structure 12 comprises a carbonnanotube wire 121 and an aluminum oxide layer 123. The aluminum oxidelayer 123 is coated on a surface of the carbon nanotube wire 121, andthe aluminum oxide layer 123 and the carbon nanotube wire 121 arelocated coaxially. The vanadium dioxide layer 14 is coated on a surfaceof the composite structure 12, and the vanadium dioxide layer 14 and thecomposite structure 12 are located non-coaxially. In the nanofiberactuator 200, a thickness of the vanadium dioxide layer 14 can beselected according to actual needs, and a ratio between a maximumthickness of the vanadium dioxide layer 14 and a minimum thickness ofthe vanadium dioxide layer 14 is in a range from about 9:1 to about 7:1.In one embodiment, the ratio between the maximum thickness of thevanadium dioxide layer 14 and the minimum thickness of the vanadiumdioxide layer 14 is about 8:1. A percentage of the diameter of thecomposite structure 12 to the diameter of the nanofiber actuator 200 isin a range from about 10% to about 30%. In one embodiment, the ratiobetween the maximum thickness of the vanadium dioxide layer 14 and theminimum thickness of the vanadium dioxide layer 14 is about 8:1, and thepercentage of the diameter of the composite structure 12 to the diameterof the nanofiber actuator 200 is about 20%.

A method of fixing the nanofiber actuator 200 to the bionic palm 22 isnot limited. For example, the nanofiber actuator 200 can be fixed to thebionic palm 22 by pasting or welding. A material and shape of the bionicpalm 22 can be selected according to actual needs. The material of thebionic palm 22 can be a conductive material or an insulating material.The conductive material can be metal such as silver, copper, gold,aluminum, tungsten, nickel, iron, or combination thereof. The insulatingmaterial is ceramic, glass, or rubber. When the bionic palm 22 is formedby the conductive material, the carbon nanotube wire 121 can beenergized by energizing the bionic palm 22 to heat and actuate thenanofiber actuator 200. When the bionic palm 22 is formed by theinsulating material, the nanofiber actuator 200 can be heated by laserirradiation to actuate the nanofiber actuator 200. The laser can belasers of various colors, modulated laser beams, or unmodulated laserbeams, as long as a certain intensity can be achieved to bend andactuate the nanofiber actuator 200.

In one embodiment, the bionic arm 20 comprises four fingers 24 spacedfrom each other. The material of the bionic palm 22 is aluminum, and thenanofiber actuator 200 is fixed to the bionic palm 22 by a silver paste.

When the finger 24 is irradiated with laser light or the finger 24 isenergized, the vanadium dioxide layer and the composite structure arenot located coaxially in the finger 24, and a thermal mismatch betweenthe composite structure and the vanadium dioxide layer allows the finger24 to bidirectionally actuate and have a large deformation and a fastresponse speed. Therefore, the finger 24 can be quickly bent to realizea touch and grip function.

Referring to FIG. 12, a nano manipulator 30 of a third embodiment isprovided. The nano manipulator 30 comprises a base 32 and a clampingstructure 34, and the clamping structure 34 comprises two nanofiberactuators 100. The two nanofiber actuators 100 are located on the base32 and spaced from each other. The nanofiber actuator 100 comprises acomposite structure 12 and a vanadium dioxide layer 14. The compositestructure 12 comprises a carbon nanotube wire 121 and an aluminum oxidelayer 123. The aluminum oxide layer 123 is coated on a surface of thecarbon nanotube wire 121, and the aluminum oxide layer 123 and thecarbon nanotube wire 121 are located coaxially. The vanadium dioxidelayer 14 is coated on a surface of the composite structure 12, and thevanadium dioxide layer 14 and the composite structure 12 are locatednon-coaxially. Using the axis of the nanofiber actuator 100 as areference, a side with a larger thickness of the vanadium dioxide layer14 is defined as the first side, and a side with a smaller thickness ofthe vanadium dioxide layer 14 is defined as the second side. The twofirst sides of the two nanofiber actuators 100 are located adjacent toeach other, or the two second sides of the two nanofiber actuators 100are located adjacent to each other.

The base 32 is used to support the nanofiber actuator 100. The method offixing the nanofiber actuator 100 to the base 32 is not limited. Forexample, the nanofiber actuator 100 can be fixed on the base 32 bypasting, welding, or attraction between the nanofiber actuator 100 andthe base 32. A material and shape of the base 32 can be selectedaccording to actual needs. The material of the base 32 can be aconductive material or an insulating material. The conductive materialcan be metal such as silver, copper, gold, aluminum, tungsten, nickel,iron, or combination thereof. The insulating material is ceramic, glass,or rubber. When the base 32 is formed by the conductive material, thecarbon nanotube wire 121 can be energized by energizing the base 32 toheat and actuate the nanofiber actuator 100. When the base 322 is formedby the insulating material, the nanofiber actuator 100 can be heated bylaser irradiation to actuate the nanofiber actuator 100. In oneembodiment, the base 32 is a tungsten needle, and the two nanofiberactuators 100 are fixed to a tungsten needle tip through the attractiveforce between them.

The shape of the base 32 is not limited and can be selected according toactual needs. Referring to FIG. 12, the base 32 can be an integralstructure, and the two nanofiber actuators 100 are located at one end ofthe base 32 and spaced from each other. Referring to FIG. 13, in oneembodiment, the base 32 comprises two manipulation arms 36, and the twomanipulation arms 36 are spaced from each other. The two nanofiberactuators 100 are respectively located at the ends of the twomanipulation arms 36. The distance between the two manipulation arms 36can be designed according to actual needs. In one embodiment, the twonanofiber actuators 100 are located at the end of a tungsten needle tipand spaced from each other.

The two first sides of the two nanofiber actuators 100 are locatedadjacent to each other, or the two second sides of the two nanofiberactuators 100 are located adjacent to each other. When the two firstsides of the two nanofiber actuators 100 are located adjacent to eachother, a distance between the two nanofiber actuators 100 firstincreases and then decreases as the temperature increases. When the twosecond sides of the two nanofiber actuators 100 are located adjacent toeach other, the distance between the two nanofiber actuators 100 firstdecreases and then increases as the temperature increases. When thedistance between the two nanofiber actuators 100 decreases, a functionof clamping and transferring the target can be realized. In oneembodiment, the two first sides of the two nanofiber actuators 100 arelocated adjacent to each other.

FIG. 14 is a diagram of the shape change process of the nano manipulator30 when the nano manipulator 30 is irradiated with laser light. In FIG.14, the two first sides of the two nanofiber actuators 100 are locatedadjacent to each other. As shown in FIG. 14, A shows an initial shape ofthe nano manipulator 30, and B shows the shape of the nano manipulator30 when the nano manipulator 30 is initially irradiated with laserlight. C shows the shape of the nano manipulator 30 when the nanomanipulator 30 is continuously irradiated with laser light. D shows theshape of the nano manipulator 30 after stopping a laser irradiation ofthe nano manipulator 30. As shown in B, when the nano manipulator 30 isirradiated with laser light, a temperature of the nanofiber actuator 100has not reached a phase transition temperature of the vanadium dioxidelayer 14, at this time, the nanofiber actuator 100 is bent toward thesecond side. Therefore, the distance between the two nanofiber actuators100 becomes larger. As shown in C, when the nano manipulator 30 iscontinuously irradiated with laser light, the temperature of thenanofiber actuator 100 continues to increase, and the temperature of thenanofiber actuator 100 reaches and exceeds the phase transitiontemperature of the vanadium dioxide layer 14, at this time, thenanofiber actuator 100 bends toward the first side. Therefore, thedistance between the two nanofiber actuators 100 becomes smaller andcontacts each other. As shown in FIG. 14D, after the laser irradiationof the nano manipulator 30 is stopped, the nano manipulator 30 returnsto the original shape as the temperature decreases.

The nano manipulator 30 comprises two of the nanofiber actuators 100. Inthe nanofiber actuator 100, the vanadium dioxide layer 14 and thecomposite structure 12 are located non-coaxially, and a thermal mismatchbetween the vanadium dioxide layer 14 and the composite structure 12makes the nanofiber actuator 100 to have a large-scale bidirectionalactuation function, have large displacements and large deformations,which facilitates the nano manipulator 30 to clamp and transfer thetarget. Since the diameter of the nanofiber actuator 100 is on thenanometer level, it is advantageous for clamping nanometer particles,and at the same time, the response speed of the nanofiber actuator 100is fast, which is beneficial to increase the clamping speed.

Referring to FIG. 15, a laser remote control switching system isprovided. The laser remote control switch system comprises a lasersource and a control circuit 40. The control circuit 40 comprises apower 42, an electronic device 43, a first electrode 44, a secondelectrode 46, and a photosensitive element 48. The power 42, theelectronic device 43, the first electrode 44, the photosensitive element48 and the second electrode 46 are electrically connected in sequence toform a loop. The photosensitive element 48 comprises two nanofiberactuators 100. The nanofiber actuator 100 comprises a compositestructure 12 and a vanadium dioxide layer 14. The composite structure 12comprises a carbon nanotube wire 121 and an aluminum oxide layer 123.The aluminum oxide layer 123 is coated on a surface of the carbonnanotube wire 121, and the aluminum oxide layer 123 and the carbonnanotube wire 121 are located coaxially. The vanadium dioxide layer 14is coated on a surface of the composite structure 12, and the vanadiumdioxide layer 14 and the composite structure 12 are locatednon-coaxially. The laser source is used to irradiate the photosensitiveelement 48, and the nanofiber actuator 100 in the photosensitive element48 bends and actuates with changes in temperature to open or close theloop, that is, the control circuit 40 is turned off and on.

The two nanofiber actuators 100 are respectively located at the ends ofthe first electrode 44 and the second electrode 46. A distance betweenthe two nanofiber actuators 100 and positions located on the ends of thefirst electrode 44 and the second electrode 46 can be designed accordingto actual needs, as long as the two nanofiber actuators 100 can bent andbe in contact with each other. Specifically, the first electrode 44 hasa first end and a second end opposite to the first end. The secondelectrode 46 has a third end and a fourth end opposite to the forth end.The second end and the fourth end are adjacent and spaced from eachother, and the two nanofiber actuators 100 are respectively located onthe second end and the fourth end. In one embodiment, the second end andthe fourth end are located parallel and spaced from each other. In oneembodiment, the first electrode 44 and the second electrode 46 areparallel and spaced from each other. The two nanofiber actuators 100 arerespectively fixed to the second end of the first electrode 44 and thefourth end of the second electrode 46 by silver paste. The two nanofiberactuators 100 are also are located parallel and spaced from each other.Using the axis of the nanofiber actuator 100 as a reference, a side witha larger thickness of the vanadium dioxide layer 14 is defined as thefirst side, and a side with a smaller thickness of the vanadium dioxidelayer 14 is defined as the second side. The two first sides of the twonanofiber actuators 100 are located adjacent to each other, or the twosecond sides of the two nanofiber actuators 100 are located adjacent toeach other. In one embodiment, the two first sides of the two nanofiberactuators 100 are located adjacent to each other.

In the laser remote control switching system, the photosensitive element48 is irradiated with a laser light emitted by the laser source to turnon the control circuit 40, so that a current flows through theelectronic device 43 to operate the electronic device 43. The lasersource is a laser emitting device. The laser can be lasers of variouscolors, o modulated laser beams, or unmodulated laser beams, as long asa certain intensity can be achieved to bend the nanofiber actuator 100in the photosensitive element 48 to turn on the control circuit 40.

In one embodiment, the photosensitive element 48 is irradiated with alaser. When a temperature of the nanofiber actuator 100 does not reach aphase transition temperature of the vanadium dioxide layer 14, thenanofiber actuator 100 bents toward the second side. At this time, adistance between the two nanofiber actuators 100 becomes larger. Thephotosensitive element 48 is continuously irradiated with a laser, thetemperature of the nanofiber actuator 100 continues to rise, and whenthe temperature of the nanofiber actuator 100 reaches and exceeds thephase transition temperature of the vanadium dioxide layer 14, thenanofiber actuator 100 is bents toward the first side. At this time, thedistance between the two nanofiber actuators 100 becomes smaller andeventually contacts each other to turn on the control circuit 40,causing current to flow through the electronic device 43 and start theelectronic device 43.

The electronic device 43 is a remote object controlled by the laserremote control switch system. The electronic device 43 can be householdappliances, such as lamps, air conditioners, televisions, etc., but isnot limited to the above types.

In the laser remote control switching system, the photosensitive element48 comprises two nanofiber actuators 100. The vanadium dioxide layer 14and the composite structure 12 in the nanofiber actuator 100 are locatednon-coaxially, and a thermal mismatch between the vanadium dioxide layer14 and the composite structure 12 makes the nanofiber actuator 100 havea large-scale bidirectional actuation function. Irradiating thephotosensitive element 48 with laser light to make the two nanofiberactuators 100 bent and contact with each other directly in order to turnon the control circuit 40 and achieve the purpose of remotelycontrolling the electronic device 43. The laser light emitted by thelaser source is directly used as a control signal. The signal receivedby the photosensitive element 48 does not require a demodulation andamplification circuit, so that the control circuit has a simplestructure, low cost, greatly improved reliability, and stronganti-interference. Moreover, a diameter of the nanofiber actuator 100 isin nanometer sized, thus the nanofiber actuator 100 has a fasterresponse rate, thereby improving a sensitivity of the laser remotecontrol switching system can be improved.

Even though numerous characteristics and advantages of certain inventiveembodiments have been set out in the foregoing description, togetherwith details of the structures and functions of the embodiments, thedisclosure is illustrative only. Changes can be made in detail,especially in matters of an arrangement of parts, within the principlesof the present disclosure to the full extent indicated by the broadgeneral meaning of the terms in which the appended claims are expressed.

Depending on the embodiment, certain of the steps of methods describedcan be removed, others can be added, and the sequence of steps can bealtered. It is also to be understood that the description and the claimsdrawn to a method can comprise some indication in reference to certainsteps. However, the indication used is only to be viewed foridentification purposes and not as a suggestion as to an order for thesteps.

The embodiments shown and described above are only examples. Even thoughnumerous characteristics and advantages of the present technology havebeen set forth in the foregoing description, together with details ofthe structure and function of the present disclosure, the disclosure isillustrative only, and changes can be made in the detail, especially inmatters of shape, size and arrangement of the parts within theprinciples of the present disclosure up to, and including the fullextent established by the broad general meaning of the terms used in theclaims. It will, therefore, be appreciated that the embodimentsdescribed above can be modified within the scope of the claims.

What is claimed is:
 1. A nano manipulator comprising: a base, and aclamping structure comprising two nanofiber actuators located on thebase and spaced from each other, wherein each of the two nanofiberactuators comprises a composite structure and a vanadium dioxide layer,the vanadium dioxide layer is coated on a surface of the compositestructure, and the vanadium dioxide layer and the composite structureare located non-coaxially with each other, the composite structurecomprises a carbon nanotube wire and an aluminum oxide layer, thealuminum oxide layer is coated on a surface of the carbon nanotube wire,the aluminum oxide layer and the carbon nanotube wire are locatedcoaxially with each other.
 2. The nano manipulator of claim 1, wherein aratio between a maximum thickness of the vanadium dioxide layer and aminimum thickness of the vanadium dioxide layer is in a range from 9:1to 7:1.
 3. The nano manipulator of claim 2, wherein the maximumthickness of the vanadium dioxide layer is approximately 72 nm, and theminimum thickness of the vanadium dioxide layer is 9 nm.
 4. The nanomanipulator of claim 1, wherein a length of the carbon nanotube wire isin a range from 10 μm to 3 cm.
 5. The nano manipulator of claim 1,wherein a diameter of the carbon nanotube wire is in a range from 0.5 nmto 100 nm.
 6. The nano manipulator of claim 1, wherein a length of thecarbon nanotube wire is greater than 1 cm.
 7. The nano manipulator ofclaim 1, wherein the carbon nanotube wire is a non-twisted carbonnanotube wire, the non-twisted carbon nanotube wire comprises aplurality of carbon nanotubes, and the plurality of carbon nanotubes aresubstantially parallel to each other and joined end to end by Van derWaals attractive force along a axis of the carbon nanotube wire.
 8. Thenano manipulator of claim 1, wherein the carbon nanotube wire is atwisted carbon nanotube wire, and the twisted carbon nanotube wirecomprises a plurality of carbon nanotubes oriented around an axialdirection of the twisted carbon nanotube wire.
 9. The nano manipulatorof claim 1, wherein the composite structure further comprise a carbonlayer, the carbon layer is located between the carbon nanotube wire andthe aluminum oxide layer, and the carbon layer is located coaxially withthe carbon nanotube wire and the aluminum oxide layer.
 10. The nanomanipulator of claim 9, wherein a thickness of the aluminum oxide layeris in a range from 5 nm to 100 nm.
 11. The nano manipulator of claim 10,wherein the vanadium dioxide layer is a doped vanadium dioxide layer,and a doped material in the vanadium dioxide layer is tungsten,molybdenum, aluminum, phosphorus, niobium, thallium, fluorine orcombinations thereof.
 12. The nano manipulator of claim 9, wherein athickness of the carbon layer is in a range from 0.1 nm to 10 nm. 13.The nano manipulator of claim 1, wherein the vanadium dioxide layer ispure vanadium dioxide layer.